1. Center for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, West Dazhi Street, Harbin 150001, China
2. Chongqing Research Institute of Harbin Institute of Technology, Chongqing 401135, China
3. National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, West Dazhi Street, Harbin 150080, China