Affiliation:
1. Department of Materials Science and Engineering Virginia Polytechnic Institute and State University Blacksburg, VA 24061-0237
Abstract
The excellent electrical and optical properties of di amond are the driving force behind the current research in produc ing thin films of diamond. Based upon the unique properties of dia mond, enormous state-of-the-art novel electron devices and sensor configurations are possible. The synthesis of crystalline diamond in the laboratory provides tremendous opportunities to benefit from its unique properties. A critical review of the diamond depo sition process is presented. Recent NRL studies suggest deposition of good quality diamond films in a turbulent flow regime where CVD processes normally operate in local thermal equilibrium (LTE). Modifications are suggested to further enhance the deposi tion rates of diamond films. A brief account is provided of hybrid microelectronics, opto-electronic, and other novel devices realizable with the diamond material. Thermal management of electronic devices is extremely important in the design of sensors and high-speed, high-density electronic circuits with power de vices fabricated monolithically. A preliminary theoretical compu tation for comparison of the power dissipation vs. gate propagation delay for diamond, silicon, and gallium arsenide-based devices is presented. Thermal interaction of semiconductor devices on the substrates as it relates to their close proximity and spacing is ad dressed. Computations of simulated analytical expressions indicate that diamond devices can withstand higher temperatures of opera tion without any significant deterioration in electrical perfor mance.
Subject
Mechanical Engineering,General Materials Science
Cited by
3 articles.
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