1. Institute of Intelligent Manufacturing and Control, Wuhan University of Technology, Wuhan 430063, China, Department of Mechanical and Aerospace Engineering, The Ohio State University, Columbus, OH 43210, USA
2. Department of Mechanical and Aerospace Engineering, The Ohio State University, Columbus, OH 43210, USA,
3. Department of Mechanical and Aerospace Engineering, The Ohio State University, Columbus, OH 43210, USA
4. Institute of Intelligent Manufacturing and Control, Wuhan University of Technology, Wuhan 430063, China
5. Institute of Intelligent Manufacturing and Control, Wuhan University of Technology, Wuhan 430063, China, Institute of Micro/Nano Actuation and Control, Nanchang Institute of Technology, Nanchang 330099, China