Investigations of TiC and SiC films synthesized by DC magnetron sputtering and thermal annealing

Abstract

In this research article, two-dimensional thin films of titanium, hierarchical titanium-carbon, titanium carbide, hierarchical silicon-carbon, and silicon carbide films were synthesized on the plates of AISI 304 stainless steel and glass slides, individually, using DC magnetron sputtering techniques. During the sputtering process, the creation of stable plasma was affected by the vacuum level, DC potential, plasma current, and Argon gas. The results showed that the coatings of titanium, titanium-carbon, and titanium carbide modified the optical properties of stainless steel. Additionally, titanium carbide coatings displayed a shiny gold appearance with a hardness of 1500 HV. Besides this, X-ray diffraction studies revealed a hexagonal Ti in the metallic films and C60, and diamond-like structures dispersed on its surface after the carbon coating. The spherical particulates of Ti and C60/diamond-like carbon particulates anchored on its surface were observed using scanning electron microscope analysis. The structural analysis indicated C vacant sites, which are available for ionic/electronic charge diffusion, thereby rendering these structures suitable for making Li storage batteries as electrode material.