A macro–micro motion servopneumatic device

Abstract

Micro motion tasks can be found in a wide set of applications, ranging from the assembly of small parts in the semiconductor industry to assisted surgery in medicine. Conventional actuation systems for these types of task are based on the existence of electromagnetic fields (servomotors) or on the existence of some kind of material shape alteration (piezoelectric actuators). Driven by the intrinsic advantages presented by pneumatic systems, such as low cost, the absence of heat or magnetic field generation and a wide range of operation, this article presents a different approach, based on the use of commonly available industrial servopneumatic components. Experimental results show that it is possible to correctly follow 5 µm step references within a 280 mm stroke, without any controller retuning and with mass load changes from 2.69 to 13.1 kg.