A flexure-based scanner for a fully bidirectional operation driven by a differential piezo force

Abstract

In this paper, a flexure-based scanner driven by a differential piezo force is proposed for a fully bidirectional operation. The differential piezo force is generated by piezo-driven actuation mechanisms that are arranged antagonistically. The scanner consists of a target platform, a double compound linear guide mechanism, and two identical actuation mechanisms that are piezo-driven mechanical amplifiers that magnify the displacement of a stack-type piezo actuator. The actuation mechanisms are symmetrically mounted on both sides of the target platform, and generate antagonistic pull forces. The difference in the pull forces causes the motion of the target platform. Due to its symmetric structure, the proposed scanner can conduct a bidirectional motion along the positive and negative directions. Through design and analysis, the scanner is manufactured, and then the bidirectional motion and control performance of the scanner are demonstrated.