Publisher
Japan Society for Precision Engineering
Reference10 articles.
1. 1) S. Ninomiya, K. Ichiki, H. Yamada, Y. Nakata, T. Seki, T. Aoki and J. Matsuo : Precise and fast secondary ion mass spectrometry depth profiling of polymer materials with large Ar cluster ion beams, Rapid Commun. Mass Spectrom. 23 (2009) 1601.
2. 2) T. Miyayama, N. Sanada, S. R. Bryan, J. S. Hammond and M. Suzuki : X-ray photoelectron spectroscopy study of polyimide thin films with Ar cluster ion depth profiling, Surf. Interface Anal. 42 (2010) 145.
3. 3) S. Iida, T. Miyayama, G. L. Fisher, J. S. Hammond, S. R. Bryan and N. Sanada : A new approach for determining accurate chemical distributions using in-situ GCIB cross-section imaging, Surf. Interface Anal. 46 (2014) 83.
4. 4) N. Sanada, A. Yamamoto, R. Oiwa and Y. Ohashi : Extremely low sputtering degradation of polytetrafluoroethylene by C60 ion beam applied in XPS analysis, Surf. Interface. Anal. 36 (2004) 280.
5. 5) I. Yamada, J. Matsuo, Z. Insepov, T. Aoki, T. Seki and N. Toyoda : Nano-processing with gas cluster ion beams, Nucl. Instr. and Meth. in Phys. Res. B 164 (2000) 944.
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