Development and Applications of Sumitomo Precision Stage Technologies for FPD Process-Reference-Cited by-同舟云学术

Development and Applications of Sumitomo Precision Stage Technologies for FPD Process

Published:2012 Issue:2 Volume:78 Page:117-121
ISSN:0912-0289
Container-title:Journal of the Japan Society for Precision Engineering
language:en
Short-container-title:Journal of the Japan Society for Precision Engineering

Author:

TOMITA Yoshiyuki,KOJIMA Eiji,KAWACHI Shunichi,KOYANAGAWA Yasushi,OOTSUKA Seiji

Publisher

Japan Society for Precision Engineering

Subject

Mechanical Engineering

Reference6 articles.

1. 2) A. H. Slocum : Precision Machine Design, Prentice-Hall, (1992).

2. 3) Y. Tomita and Y. Koyanagawa : Proceedings of the ICPT2010, (2010).

3. 5) K. Ohishi, M. Nakao, K. Ohnishi and K. Miyachi : Micro-Processor-Controlled DC Motor for Load-Insensitive Position Servo System, IEEE Trans. Ind. Electron., IE-34, 1 (1987) 44-49.

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