Author:
Shi Yaping,Zhou Qian,Li Xinghui,Ni Kai,Wang Xiaohao
Funder
Natural Science Foundation of Guangdong Province
Shenzhen Fundamental Research Funding
Youth Funding of Shenzhen Graduate of Tsinghua University
National Natural Science Foundation of China
Cross Research fund in Graduate School at Shenzhen, Tsinghua University
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. Measurement technologies for precision positioning;Gao;CIRP Ann.-Manuf. Technol.,2015
2. Technology and applications of grating interferometers in high-precision measurement;Teimel;Precis. Eng.-J. Am. Soc. Precis. Eng.,1992
3. Absolute Optical Encoder with BiSS Serial Communications;Renishaw,2014
4. Linear Scale;Laser scale,2020
5. Sealed Linear Encoder LC;Heidenhain,2015
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