A Wavelength-Stabilized and Quasi-Common-Path Heterodyne Grating Interferometer With Sub-Nanometer Precision-Reference-Cited by-同舟云学术

A Wavelength-Stabilized and Quasi-Common-Path Heterodyne Grating Interferometer With Sub-Nanometer Precision

Published:2024 Issue: Volume:73 Page:1-9
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Wang Guochao¹^ORCID,Gao Lvye²^ORCID,Huang Guangyao²^ORCID,Lei Xiaoyang¹^ORCID,Cui Can²^ORCID,Wang Shengtong²^ORCID,Yang Mingyue¹^ORCID,Zhu Junhao²^ORCID,Yan Shuhua¹^ORCID,Li Xinghui³^ORCID

Affiliation:

1. College of Intelligence Science and Technology, National University of Defense Technology, Changsha, Hunan, China

2. Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, China

3. Tsinghua Shenzhen International Graduate School and the Tsinghua Berkeley Shenzhen Institute, Tsinghua University, Shenzhen, China

Funder

Natural Science Foundation for Distinguished Young Scholars of Hunan Province

Natural Science Foundation of Hunan Province

Basic and Applied Basic Research Foundation of Guangdong Province

National Natural Science Foundation of China

Tsinghua University

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/19/10367905/10456927.pdf?arnumber=10456927

Reference50 articles.

1. An insight on optical metrology in manufacturing

2. Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry

3. A Review on Applications of Capacitive Displacement Sensing for Capacitive Proximity Sensor

4. A Flexible Multifunctional Electronic Skin for Intelligent Tactile Perception

5. Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Review: High-Precision Angle Measurement Technologies;Sensors;2024-03-08

2. Adaptive Fourier Convolution Network for Road Segmentation in Remote Sensing Images;IEEE Transactions on Geoscience and Remote Sensing;2024