Dead Zone Compensation Method by Mass Flow Rate Twin Drive System for a Pneumatic Driving System
Author:
Affiliation:
1. 株式会社ニコン
2. 東京大学
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jjspe/87/9/87_759/_pdf
Reference24 articles.
1. 1) H. Butler: Position Control in Lithographic Equipment: An Enabler for Current-Day Chip Manufacturing, IEEE Control Systems, 31, 5 (2011) 28.
2. 2) T. Oomen: Advanced Motion Control for Precision Mechatronics: Control, Identification, and Learning of Complex Systems, IEEJ Journal of Industry Applications, 7, 2 (2018) 127.
3. 3) R. H. Schmidt: Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 370 (2012) 3950.
4. 4) W. Ohnishi, H. Fujimoto, P. H. Yang, P. W. Chang, B. Yuan, K. Sakata, and A. Hara: Acoustic Wave Equation Based Modeling and Collocated Side Vibration Cancellation for Pneumatic Cylinder, IEEJ Journal of Industry Applications, 7, 2 (2018) 109.
5. 5) 宮田慶一郎, 石田公成, 花房秀郎:可変ゲイン圧力制御系を含む二重構造フィードバック制御による空気圧シリンダの位置決め, 計測自動制御学会, 26 (1990).
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