Acoustic Wave Equation Based Modeling and Collocated Side Vibration Cancellation for Pneumatic Cylinder-Reference-Cited by-同舟云学术

Acoustic Wave Equation Based Modeling and Collocated Side Vibration Cancellation for Pneumatic Cylinder

Published:2018 Issue:2 Volume:7 Page:109-116
ISSN:2187-1094
Container-title:IEEJ Journal of Industry Applications
language:en
Short-container-title:IEEJ Journal IA

Author:

Ohnishi Wataru¹,Fujimoto Hiroshi¹,Yang Pai-Hsueh²,Chang Ping-Wei²,Yuan Bausan²,Sakata Koichi³,Hara Atsushi³

Affiliation:

1. The University of Tokyo

2. Nikon Research Corporation of America

3. Nikon Corporation

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering,Energy Engineering and Power Technology,Automotive Engineering

Link

https://www.jstage.jst.go.jp/article/ieejjia/7/2/7_109/_pdf

Reference18 articles.

1. (1) H. Butler: “Position Control in Lithographic Equipment”, IEEE Control Systems Magazine, Vol. 31, No. 5, pp. 28-47 (2011)

2. (2) K. Saiki, A. Hara, K. Sakata, and H. Fujimoto: “A Study on High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control Method Based on Multirate Feedforward Control”, IEEE Transactions on Industrial Electronics, Vol. 57, No. 4, pp. 1393-1400 (2010)

3. (3) T. Goto and M. Yuasa: “Recent Control Technology for Semiconductor Exposure Appratus”, Journal of the Society of Instrument and Control Engineers, Vol. 52, No. 5, pp. 425-429 (2013) (in Japanese)

4. (4) T. Kagawa, K. Sakaki, L. R. Tokashiki, and T. Fujita: “Accurate Positioning of a Pneumatic Servo System With Air Bearings”, in Proceedings of the JFPS International Symposium on Fluid Power, pp. 693-698 (2002)

5. (5) Y. Shibazaki, H. Kohno, and M. Hamatani: “An innovative platform for high-throughput, high-accuracy lithography using a single wafer stage”, in Proc. SPIE 7274, pp. 1-12 (2009)

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dead Zone Compensation Method by Mass Flow Rate Twin Drive System for a Pneumatic Driving System;Journal of the Japan Society for Precision Engineering;2021-09-05

2. Two-Degree-of-Freedom Flow Rate Control for Pneumatic Valves using Fast Response Flow Meter;IEEJ Journal of Industry Applications;2021-03-01

3. Effect of Dead Zone Compensation by Mass-Flow-Rate Twin-Drive System with Anti-Windup for Pressure Control System;IEEJ Journal of Industry Applications;2021

4. Controller design of mass flow rate loop for high-precision pneumatic actuator;2020 IEEE 16th International Workshop on Advanced Motion Control (AMC);2020-09-14