Characteristics of a hermetic 6H-SiC pressure sensor at 600 C
Author:
Affiliation:
1. NASA, Glenn Research Center, Cleveland, OH
2. Sienna Technologies, Inc., Woodingville, WA
Publisher
American Institute of Aeronautics and Astronautics
Link
http://arc.aiaa.org/doi/pdf/10.2514/6.2001-4652
Reference15 articles.
1. P. G. Neudeck, "The VLSI Handbook/' CRC Press LLC, ed. Wai-Kai Chen, Ch. 6, pp.3, (1999).
2. L. Bemis, J. S. Shor, A. D. Kurtz. Institute of Physics Conf. Series (UK) No. 137, Ch.7 pp.723-726, (1994).
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