CVD Grown Materials for High Temperature Electronic Devices : A Review
Author:
Publisher
Informa UK Limited
Subject
Ceramics and Composites
Link
http://www.tandfonline.com/doi/pdf/10.1080/0371750X.2011.10600145
Reference89 articles.
1. A review of diamond CVD utilizing halogenated precursors
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3. Pierson , H. O. 1999 .CVD in Electronics Applications: Semiconductors Handbook of Chemical Vapor Deposition CVD, 345 – 66 . Amsterdam , The Netherlands : Elsevier . Second
4. Pierson , H. O. 1999 .CVD in Electronics Applications: Conductors, Insulators, and Diffusion Barriers Handbook of Chemical Vapor Deposition CVD, 367 – 83 . Amsterdam , The Netherlands : Elsevier . Second Edition
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