Leading Edge Technologies: Backside Power Delivery

Author:

Lo William1,Tong Tom Xianghong2

Affiliation:

1. Nvidia

2. Intel

Abstract

Abstract An architectural shift to buried power rails (BPRs) with backside power delivery (BPD) is on the horizon as CMOS technology approaches the 2 nm node. The obstruction created by the presence of BPD networks obsoletes many of the electrical fault isolation (EFI) techniques that have been used for the past few decades and severely degrades the performance of others. This chapter provides an overview of EFI methods that are still applicable to ICs with BPD networks, including e-beam and atomic force probing, x-ray and magnetic field imaging, and lock-in thermography. It assesses the technical challenges of each method as well as the potential for improvement.

Publisher

ASM International

Reference29 articles.

1. ReleaseIntel Press, “Intel Accelerates Process and Packaging Innovations,” 2021. https://www.intel.com/content/www/us/en/newsroom/news/intel-accelerates-process-packaging-innovations.html.

2. DillingerT., TSMC 2022 Technology Symposium Review—Process Technology Development. Semiwiki.com Blog, 06-22-2022. https://semiwiki.com/semiconductor-manufacturers/tsmc/314415-tsmc-2022-technology-symposium-review-process-technology-development/.

3. ShaikA.I., Samsung plans to manufacture 1.4nm semiconductor chips by 2027, Sammobile.com Blog, 10-04-2022. https://www.sammobile.com/news/samsung-1-4nm-chips-manufacturing-2027-2nm-chips-2025/.

4. Extending the roadmap beyond 3nm through system scaling boosters: A case study on Buried Power Rail and Backside Power Delivery;Rickert;2019 Electron Devices Technology and Manufacturing Conference (EDTM)

5. Buried Power Rails and Back-side Power Grids: Arm® CPU Power Delivery Network Design Beyond 5nm;Prasad;2019 IEEE International Electron Devices Meeting (IEDM),2019

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3