Laser Voltage Probing of Integrated Circuits: Implementation and Impact

Author:

Serrels Keith A.,Ganesh Ulrike

Publisher

ASM International

Reference54 articles.

1. Patent US 4758092, A Method and Means for Optical Detection of Charge Density Modulation in a Semiconductor (1988)

2. Heinrich Harley K., “A Noninvasive Optical Probe for Detecting Electrical Signals in Silicon Integrated Circuits”, Ph.D. Dissertation, Stanford University, California (1987)10.1007/978-1-4613-0979-6_34

3. Noninvasive Optical Sheet Charge Density Probe for Silicon Integrated Circuits;Heinrich;IEEE Trans. Electron Devices,1987

4. Kindereit Ulrike, “Investigation of Laser-Beam Modulations Induced by the Operation of Electronic Devices”, Ph.D. Dissertation, Technical University of Berlin, Germany (2009)

5. Quantitative Investigation of Laser Beam Modulation in Electrically Active Devices as Used in Laser Voltage Probing;Kindereit;IEEE Trans. Device and Mat. Rel.,2007

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