High-Aspect-Ratio Ruthenium Lines for Buried Power Rail-Reference-Cited by-同舟云学术

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High-Aspect-Ratio Ruthenium Lines for Buried Power Rail

Published:2018-06 Issue: Volume: Page:
ISSN:
Container-title:2018 IEEE International Interconnect Technology Conference (IITC)
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Author:

Gupta Anshul,Kundu Shreya,Teugels Lieve,Bommels Jurgen,Adelmann Christoph,Heylen Nancy,Jamieson Geraldine,Pedreira Olalla Varela,Ciofi Ivan,Chava Bharani,Wilson Christopher J.,Tokei Zsolt

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8411791/8430288/08430415.pdf?arnumber=8430415

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. BS-PDN Implemented the Latest Logic Devices for 14 Angstrom Technology Node;IEEE Transactions on Electron Devices;2024-07

2. Insight Into Electromigration Reliability of Buried Power Rail With Alternative Metal Material;IEEE Transactions on Electron Devices;2024-01

3. A Modeling Study: Applying Carbon-Based Interconnects to BS-PDN Architecture;2023 IEEE 15th International Conference on ASIC (ASICON);2023-10-24

4. Electromigration Reliability of Buried Power Rails in Vertically Stacked Devices;2023 IEEE International Integrated Reliability Workshop (IIRW);2023-10-08

5. Impact of Backside Power Delivery Network with Buried Power Rails on Latch-up Immunity in DTCO/STCO;2023 45th Annual EOS/ESD Symposium (EOS/ESD);2023-10-02

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