BS-PDN Implemented the Latest Logic Devices for 14 Angstrom Technology Node
Author:
Affiliation:
1. Department of Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Gyeongbuk, Republic of Korea
2. Google LLC, Mountain View, CA, USA
Funder
Technology Innovation Program through the Ministry of Trade, Industry and Energy
National Research Foundation of Korea (NRF) through Korean Government
IC Design Education Center
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/16/10566499/10542085.pdf?arnumber=10542085
Reference19 articles.
1. Comparison of key fine-line BEOL metallization schemes for beyond 7 nm node
2. Narrow interconnects: The most conductive metals
3. Power, Performance, Area and Thermal Analysis of 2D and 3D ICs at A14 Node Designed with Back-side Power Delivery Network
4. Intel PowerVia Technology: Backside Power Delivery for High Density and High-Performance Computing
5. High-Aspect-Ratio Ruthenium Lines for Buried Power Rail
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