Author:
Vatanparvar Daryosh,Hii Doreen,Shkel Andrei M.
Funder
Advanced Research Projects Agency
Cited by
4 articles.
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1. Achieving 1 Million Quality Factor in Fused Silica Planar Frame Resonator (PFR);IEEE Transactions on Components, Packaging and Manufacturing Technology;2023-05
2. Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes;Journal of Microelectromechanical Systems;2022-12
3. Effect of Metallization on Fused Silica Dual-Shell Gyroscopes;2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2022-05-08
4. Digital Manufacturing of Resonance Mems From A Single-Layer Fused Silica Material;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09