Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes
Author:
Affiliation:
1. Department of Mechanical and Aerospace Engineering, MicroSystems Laboratory, University of California at Irvine, Irvine, CA, USA
Funder
Defense Advanced Research Projects Agency
U.S. Department of Commerce, National Institute of Standards and Technology
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://ieeexplore.ieee.org/ielam/84/9967022/9870810-aam.pdf
Reference44 articles.
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2. Effect of EAM on Capacitive Detection of Motion in MEMS Vibratory Gyroscopes
3. Internal Friction in Solids II. General Theory of Thermoelastic Internal Friction
4. Internal Friction in Solids. I. Theory of Internal Friction in Reeds
5. Study on surface roughness improvement of Fused Quartz after thermal and chemical post-processing
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