Design and Simulation of Piezoelectric Wideband Acoustic Sensor Covered with Organic Film-Reference-Cited by-同舟云学术

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Design and Simulation of Piezoelectric Wideband Acoustic Sensor Covered with Organic Film

Published:2024-02-16 Issue: Volume: Page:59-63
ISSN:
Container-title:2024 1st International Conference on Robotics, Engineering, Science, and Technology (RESTCON)
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Author:

Kuchiji Hiroyuki¹,Masumoto Naoki¹,Morishita Kota²,Hasegawa Shunta³,Suzuki Takaaki³,Baba Akiyoshi²

Affiliation:

1. Nisshinbo Micro Devices Inc.,Advanced Technology Development Dept.,Chuo-Ku, Tokyo,Japan

2. Kyushu Institute of Technology,Center for Microelectronic Systems,Iizuka-City, Fukuoka,Japan

3. Gunma University Kiryu-City,Division of Mechanical Science and Technology,Gunma,Japan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10463532/10463547/10463576.pdf?arnumber=10463576

Reference8 articles.

1. Piezoelectric MEMS wideband acoustic sensor coated by organic film

2. A Novel Broadband Forcecardiography Sensor for Simultaneous Monitoring of Respiration, Infrasonic Cardiac Vibrations and Heart Sounds

3. Predictive maintenance by using ultrasound technique for rotating equipments in thermal power plants;Mohammed,2010

4. PIEZOELECTRIC MEMS MICROPHONES NOISE SOURCES

5. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

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