Direct UV-Imprinting of Hybrid-Polymer Photonic Microring Resonators and Their Characterization
Author:
Affiliation:
1. Institute of Semiconductors and Microsystems, Technische Universität Dresden, Germany
2. Fraunhofer Institute for Photonic Microsystems, Germany
3. micro resist technology GmbH, Germany
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Atomic and Molecular Physics, and Optics
Link
http://xplorestaging.ieee.org/ielx7/50/6781021/06756932.pdf?arnumber=6756932
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3. Hybrid Polymers for Conventional and Additive Manufacturing of Microoptical Elements;Springer Series in Optical Sciences;2020-11-22
4. Green photonics integrated circuits based on organic–inorganic hybrids;Nanocomposites for Photonic and Electronic Applications;2020
5. Polymer-Based Microring Resonator with the Multimode Interference Coupler Operating at Very-Near-Infrared Wavelengths;Applied Sciences;2019-07-04
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