Submicron wiring technology with tungsten and planarization-Reference-Cited by-同舟云学术

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Submicron wiring technology with tungsten and planarization

Published:1987 Issue: Volume: Page:
ISSN:
Container-title:1987 International Electron Devices Meeting
language:
Short-container-title:

Author:

Kaanta C.,Cote W.,Cronin J.,Holland K.,Pei-Ing Lee ,Wright T.

Publisher

IRE

Link

http://xplorestaging.ieee.org/ielx5/9953/31997/01487347.pdf?arnumber=1487347

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