Author:
Sun Baoyun,Gao Wei,Wang Pengbin,Chen Runbo,Luo Jian,Deng Jinjun,Yuan Weizheng,Ma Binghe
Cited by
1 articles.
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1. A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09