A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement-Reference-Cited by-同舟云学术

A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement

Published:2022-01-09 Issue: Volume: Page:
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Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Wang Xiaoyi¹,Chen Xingru¹,Deng Yang¹,Cheung Yik Kin¹,Jiang Peng¹,Xu Wei²,Yu Hongyu¹

Affiliation:

1. Hong Kong University of Science and Technology,Hong Kong,CHINA

2. Shenzhen University,Shenzhen,CHINA

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699452.pdf?arnumber=9699452

Reference14 articles.

1. Unsteady two-dimensional analytical model for a thermal time-of-flight flow sensor

2. CMOS MEMS Thermal Flow Sensor with Enhanced Sensitivity for HVAC Application;xu;IEEE Transactions on Industrial Electronics,2020

3. Analysis and Compensation of Benchmark Drift of Micromachined Thermal Wind Sensor Caused by Packaging Asymmetry;wang;IEEE Transactions on Industrial Electronics,2021

4. Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35µM CMOS MEMS Technology;xu;2019 20th International Conference on Solid-State Sensors Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII),0

5. Sandwich Structured Flexible Thermal Shear Stress Sensor with Improved Performance

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