Resonant PZT MEMS Mirror with Segmented Electrodes
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9039791/9056108/09056124.pdf?arnumber=9056124
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Piezoelectrically Actuated Micromirror Using Heavy Frame Supported with Soft Suspension Springs;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Spatial and directional contrast dependence in Lissajous-scanning projection systems;Optics Express;2023-05-31
3. Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation Mechanism;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
4. Arbitrary Shaped Backside Reinforcement for Two Dimensional Resonant Micromirrors;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
5. On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle;Sensors and Actuators A: Physical;2023-01
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