Si-gate CMOS devices on a Si lateral solid-phase epitaxial layer

Author:

Hirashita N.,Katoh T.,Onoda H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. References;Three-Dimensional Integrated Circuit Design;2017

2. References;Three-dimensional Integrated Circuit Design;2009

3. Cross-sectional Transmission Electron Microscope Studies on Intrinsic Breakdown Spots of Thin Gate Oxides;Japanese Journal of Applied Physics;1997-05-15

4. Temperature-independent carrier mobility in large-grain poly-Si transistors;IEEE Transactions on Electron Devices;1994

5. TEM analysis of voids in UHV-deposited amorphous Si layers used for lateral solid phase epitaxial growth;Journal of Crystal Growth;1992-03

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