Fluid Dynamic Modeling and Flow Visualization of an Industrial Wet Chemical Process Bath-Reference-Cited by-同舟云学术

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Fluid Dynamic Modeling and Flow Visualization of an Industrial Wet Chemical Process Bath

Published:2019-08 Issue:3 Volume:32 Page:334-340
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Mohr Lena¹^ORCID,Krick Tobias²,Zimmer Martin¹,Roder Thorsten²,Muller Claas³

Affiliation:

1. Division Photovoltaics, Fraunhofer Institute for Solar Energy Systems, Freiburg, Germany

2. Institute of Chemical Process Engineering, University of Applied Sciences, Mannheim, Germany

3. Department of Microsystems Engineering, Albert-Ludwigs-University, Freiburg, Germany

Funder

Ministry of Economic Affairs

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/66/8765845/08715678.pdf?arnumber=8715678

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An Improved Convolutional Neural Network for Particle Image Velocimetry;Journal of Physics: Conference Series;2023-11-01

2. Objective phase-space identification of coherent turbulent structures in 1D time series;Journal of Hydraulic Research;2022-08-08

3. Numerical Simulation of an Entire Wafer Surface during Ozone-Based Wet Chemical Etching;Industrial & Engineering Chemistry Research;2020-09-16

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