BEOL embedded RF-MEMS switch for mm-wave applications-Reference-Cited by-同舟云学术

BEOL embedded RF-MEMS switch for mm-wave applications

Published:2009-12 Issue: Volume: Page:
ISSN:
Container-title:2009 IEEE International Electron Devices Meeting (IEDM)
language:
Short-container-title:

Author:

Kaynak M.¹,Ehwald K. E.¹,Drews J.¹,Scholz R.¹,Korndorfer F.¹,Knoll D.¹,Tillack B.¹,Barth R.¹,Birkholz M.¹,Schulz K.¹,Sun Y. M.¹,Wolansky D.¹,Leidich S.²,Kurth S.²,Gurbuz Y.³

Affiliation:

1. IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany

2. Fraunhofer Research Institution for Electronic Nano Systems, 09126 Chemnitz, Germany

3. Sabanci University Orhanli, 34956 Tuzla, Istanbul, Turkey

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/5419306/5424206/05424219.pdf?arnumber=5424219

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