Lamé-Mode Resonator with Trapezoidal Grooves Based on Sc<sub>0.3</sub>Al<sub>0.7</sub> N/AlN Composite Film Achieving Coupling Coefficient of 18.7%-Reference-Cited by-同舟云学术

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Lamé-Mode Resonator with Trapezoidal Grooves Based on Sc_0.3Al_0.7 N/AlN Composite Film Achieving Coupling Coefficient of 18.7%

Published:2023-10-20 Issue: Volume: Page:
ISSN:
Container-title:2023 8th International Conference on Integrated Circuits and Microsystems (ICICM)
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Author:

Wang Zhiyu¹,Jiang Jiewei¹,Ma Chen¹,Yang Fengyuan¹,Ma Yiming¹,Wang Nan¹

Affiliation:

1. Shanghai University,School of Microelectronics,Shanghai,China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10365709/10365561/10365565.pdf?arnumber=10365565

Reference13 articles.

1. Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN Lamb wave resonators

2. Cross-sectional dilation mode resonator with very high electromechanical coupling up to 10% using AlN

3. Aluminum nitride two-dimensional-resonant-rods

4. Investigation of modified Lamé mode resonator with high coupling coefficient

5. Electrode design of AlN Lamb wave resonators

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