Improved Processing Window of Contact Hole with Directed Self-Assembly of Block Copolymer Blends-Reference-Cited by-同舟云学术

Improved Processing Window of Contact Hole with Directed Self-Assembly of Block Copolymer Blends

Published:2022-10-21 Issue: Volume: Page:
ISSN:
Container-title:2022 International Workshop on Advanced Patterning Solutions (IWAPS)
language:
Short-container-title:

Author:

Wu Zhiyong¹,Dong Qingshu²,Xu Xingran¹,Li Zili¹,Liu Yadong³,Ji Shengxiang³,Li Weihua²,Manhua Shen⁴,Xiong Shisheng¹

Affiliation:

1. Fudan University,School of Information Science and Technology,Shanghai,China

2. Fudan University,State Key Laboratory of Molecular Engineering of Polymers, Key Laboratory of Computational Physical Sciences,Department of Macromolecular Science,Shanghai,China

3. Key Laboratory of Polymer Ecomaterials Changchun Institute of Applied Chemistry,Chinese Academy of Sciences,Changchun,China

4. Shanghai IC R&D Center (ICRD),Shanghai,China

Funder

Fudan University

Changchun Institute of Applied Chemistry

Chinese Academy of Sciences

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9971792/9972241/09972333.pdf?arnumber=9972333

Reference8 articles.

1. Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

2. Boundary-directed epitaxy of block copolymers

3. Implementation of templated DSA for via layer patterning at the 7nm node[C];gronheid;Alternative Lithographic Technologies,2015

4. Rectification of EUVpatterned contact holes using directed self-assembly[C];somervell;Advances in Resist Materials and Processing Technology XXV,2013

5. 300mm pilot line DSA contact hole process stability

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Manipulating the processing window of directed self-assembly in contact hole shrinking with binary block copolymer/homopolymer blending;iScience;2024-04

2. Contact Hole Multiplication by Directed Self-Assembly of Block Copolymer with Homopolymer-Blending;2023 International Workshop on Advanced Patterning Solutions (IWAPS);2023-10-26