Modified Beam Structures for Improved Resonant Sensing-Reference-Cited by-同舟云学术

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Modified Beam Structures for Improved Resonant Sensing

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Ghaderi Erfan¹,Bahreyni Behraad¹

Affiliation:

1. Simon Fraser University,Burnaby,Canada

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052235.pdf?arnumber=10052235

Reference12 articles.

1. Resonant silicon sensors

2. An Ultra-High Resolution Resonant MEMS Accelerometer

3. Synchronous Demodulation for Low Noise Measurements

4. A MEMS resonant accelerometer with sensitivity enhancement and adjustment mechanisms

5. A Sub-µg Bias-Instability MEMS Oscillating Accelerometer With an Ultra-Low-Noise Read-Out Circuit in CMOS

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Process-agnostic design approaches to increase the performance of resonant sensors;Sensors and Actuators A: Physical;2023-12

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