登录 注册 会员服务 联系我们

A MEMS resonant accelerometer with sensitivity enhancement and adjustment mechanisms

  • Published:2017-10-16 Issue:11 Volume:27 Page:115010
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Ding Hong,Wang WenORCID,Ju Bing-Feng,Xie JinORCID

Funder

Fundamental Research Funds for the Central Universities

Science Fund for Creative Research Groups of National Natural Science Foundation of China

National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel design of a MEMS resonant accelerometer with adjustable sensitivity;Sensors and Actuators A: Physical;2024-12

2. A Review on MEMS Silicon Resonant Accelerometers;Journal of Microelectromechanical Systems;2024-04

3. Design and Sensitivity Analysis of a Micro-Resonant Accelerometer With Adjustable Stiffness;IEEE Sensors Journal;2024-03-01

4. Process-agnostic design approaches to increase the performance of resonant sensors;Sensors and Actuators A: Physical;2023-12

5. Modified Beam Structures for Improved Resonant Sensing;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3