High-Performance Wafer-Scale Transfer-Free Graphene Microphones-Reference-Cited by-同舟云学术

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High-Performance Wafer-Scale Transfer-Free Graphene Microphones

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Pezone Roberto¹,Baglioni Gabriele²,Sarro Pasqualina M.¹,Steeneken Peter G.²,Vollebregt Sten¹

Affiliation:

1. Delft University of Technology,Laboratory of Electronic Components, Technology and Materials (ECTM),Department of Microelectronics,The Netherlands

2. Delft University of Technology,Kavli Institute of Nanoscience,Department of Quantum Nanoscience,The Netherlands

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052360.pdf?arnumber=10052360

Reference15 articles.

1. Effects of graphene defects on gas sensing properties towards NO2 detection

2. Ultra-thin free-standing single crystalline silicon membranes with strain control

3. Sensitive Transfer-Free Wafer-Scale Graphene Microphones

4. Raman Spectroscopy in Graphene;malard;Phys Rep,2009

5. Optical Characterization of Ultra Sensitive Graphene Membranes for Microphone Applications;baglioni;Under Review,2022

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