MEMS Capacitance Diaphragm Gauge With Two Sealed Reference Cavities-Reference-Cited by-同舟云学术

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MEMS Capacitance Diaphragm Gauge With Two Sealed Reference Cavities

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
Short-container-title:

Author:

Han Xiaodong¹,Li Jingzhen²,Li Gang³,Feng Yongjian¹

Affiliation:

1. Xiamen University,School of Aerospace Engineering,China

2. Beijing University of Technology,Key Laboratory of Optoelectronics Technology, Ministry of Education, Faculty of Information Technology,China

3. Lanzhou Institute of Physics,Science and Technology on Vacuum Technology and Physics Laboratory,China

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052333.pdf?arnumber=10052333

Reference13 articles.

1. Miniature capacitance diaphragm gauge for absolute vacuum measurement

2. Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm

3. Design and fabrication of an absolute pressure MEMS capacitance vacuum sensor based on silicon bonding technology

4. Analysis on edge effect of MEMS capacitance diaphragm gauge with square pressure-sensing diaphragm

5. Stochastic resonance in MEMS capacitive sensors

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A MEMS resonant vacuum gauge for high vacuum measurement;Vacuum;2024-10

2. A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems;2023 IEEE SENSORS;2023-10-29

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