Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm-Reference-Cited by-同舟云学术

Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm

Published:2020-10 Issue: Volume:313 Page:112154
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Han Xiaodong,Xu Mahui,Li Gang,Yan Huangping,Feng Yongjian,Li Detian

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

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2. Recent progress of miniature MEMS pressure sensors;Song;Micromachines.,2020

3. Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer;Azizollah;Solid. Electron.,2018

4. Design and analysis of a novel MEMS capacitive ttire PressureSensor with high sensitivity and linearity;Norouznejad;Majlesi Journal of Telecommunication Devices,2016

5. Miniature and MEMS-type vacuum sensors and pumps;Górecka-Drzazga;Vacuum,2009

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