Sub-3 DB Insertion Loss Broadband Acoustic Delay Lines and High Fom Resonators in LiNbO3/SiO2/Si Functional Substrate
Author:
Affiliation:
1. National Tsing Hua University,Department of Power Mechanical Engineering,Hsinchu,Taiwan
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052343.pdf?arnumber=10052343
Reference16 articles.
1. Silicon-SAW Resonators and Delay Lines based on Sub-micron Lithium Niobate and Amorphous Silicon
2. Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators;hsu;J Micromech Microeng,2021
3. Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide
4. High-performance surface acoustic wave devices using LiNbO3/SiO2/SiC multilayered substrates;shen;IEEE Trans Microw Theory Tech,2021
5. Ultra-Low Loss and High Phase Velocity Acoustic Delay Lines in Lithium Niobate on Silicon Carbide Platform
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1. A Dispersion-Engineered YX-LN/SIO2/Sapphire SH-SAW Resonator for Enhanced Electromechanical Coupling and Rayleigh Mode Suppression;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Low Propagation Loss Acoustic Delay Lines based on YX-LiNbO3/SiO2/Sapphire;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
3. Miniature LiNbO3/SiO2/Si SH-SAW Resonators With Near-Spurious-Free Response;IEEE Electron Device Letters;2023-07
4. Analysis of 5−10 GHz Higher-Order Lamb Acoustic Waves in Thin-Film Scandium Aluminum Nitride;2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2023-05-15
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