Low Temperature sensor based on optimized Z-shaped beam actuator-Reference-Cited by-同舟云学术

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Low Temperature sensor based on optimized Z-shaped beam actuator

Published:2022-12-05 Issue: Volume:117 Page:170-175
ISSN:
Container-title:2022 International Conference on Mechatronics, Electronics and Automotive Engineering (ICMEAE)
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Author:

Tecpoyotl-Torres M.¹,Rodriguez-Fuentes S. F.²,Ferrara-Bello C. A.³,Martinez-Rodriguez D. M.⁴,Vargas-Chable P.⁴

Affiliation:

1. Universidad Autónoma del Estado de Morelos, Instituto de Investigación en Ciencias Básicas y Aplicadas, Centro de Investigación en Ingenierïa y Ciencias Aplicadas, UAEM-IICBA-CIICAp

2. Maestrïa en Sustentabilidad Energética, UAEM-IICBA-CIICAp

3. Doctorado en Ingenierïa y Ciencias Aplicadas, UAEM-IICBA-CIICAp

4. Facultad de Ciencias Quïmicas e Ingenierïa, UAEM-FCQeI

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10414478/10414479/10414511.pdf?arnumber=10414511

Reference10 articles.

1. Future of actuators and microsystems

2. Reducing MEMS product development and commercialization time;Maseeh

3. MEMS Thermal Sensor;Electronic and mechanical components,2018

4. On a MEMS based dynamic remote temperature sensor using transverse vibration of a bi-layer micro-cantilever

5. Design and fabrication of a high performance resonant MEMS temperature sensor

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