Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror
Author:
Affiliation:
1. National Tsing Hua University,Dept. of Power Mech. Eng.,Hsinchu City,Taiwan
2. National Tsing Hua University,Inst. of NanoEng. and Microsyst.,Hsinchu City,Taiwan
3. Coretronic MEMS Corporation,Hsinchu,Taiwan
Funder
National Science and Technology Council
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052250.pdf?arnumber=10052250
Reference12 articles.
1. On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems
2. A Combination of Fast Resonant Mode and Slow Static Deflection of SOI-PZT Actuators for MEMS Image Projection Display
3. Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing
4. High-speed metal-based optical microscanners using stainless-steel substrate and piezoelectric thick films prepared by aerosol deposition method
5. A contrast between DLP and LCD digital projection technology for triangulation based phase measuring optical profilometers
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1. Piezoelectric MEMS Mirror with Cantilever-Type Actuator for Compact, Low-Voltage Drive, and Wide-Angle Deflection;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
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