On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems

Author:

Dahl-Hansen Runar PlunneckeORCID,Tyholdt FrodeORCID,Gjessing Jo,Vogl Andreas,Wittendorp PaulORCID,Vedum Jon,Tybell ThomasORCID

Funder

Research Council of Norway through the NBRIX-Project

Norwegian Ph.D. Network on Nanotechnology for Microsystems, through by the Research Council of Norway, Division for Science

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Piezoelectric approaches to organic polymeric materials;Polymer International;2024-01-04

2. A Theoretical Analysis for Arbitrary Residual Stress of Thin Film/Substrate System WithNonnegligible Film Thickness;Journal of Applied Mechanics;2023-12-22

3. MEMS piezoelectric sensor for self-powered devices: A review;Materials Science in Semiconductor Processing;2023-05

4. Analytical solutions for film stress and bending deformation of coated optical lenses;International Journal of Mechanical Sciences;2023-05

5. Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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