PPAC of sheet-based CFET configurations for 4 track design with 16nm metal pitch
Author:
Affiliation:
1. Imec,Leuven,Belgium,3001
2. Parc Technologique des Fontaines,Soitec,Bernin,France,38190
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9830116/9830138/09830492.pdf?arnumber=9830492
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