Fabrication of body-tied FinFETs (Omega MOSFETs) using bulk Si wafers-Reference-Cited by-同舟云学术

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Fabrication of body-tied FinFETs (Omega MOSFETs) using bulk Si wafers

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Container-title:2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407)
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Author:

Park T.,Choi S.,Lee D.H.,Yoo J.R.,Lee B.C.,Kim J.Y.,Lee C.G.,Chi K.K.,Hong S.H.,Hynn S.J.,Shin Y.G.,Han J.N.,Park I.S.,Chung U.I.,Moon J.T.,Yoon E.,Lee J.H.

Publisher

Japan Soc. Applied Phys

Link

http://xplorestaging.ieee.org/ielx5/8657/27436/01221122.pdf?arnumber=1221122

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