Development of a micro accelerometer based MOEMS-Reference-Cited by-同舟云学术

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Development of a micro accelerometer based MOEMS

Published:2012-08 Issue: Volume: Page:
ISSN:
Container-title:2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
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Author:

Zhang Bo,Li Wen Feng

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6470515/6472924/06472984.pdf?arnumber=6472984

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sensing Techniques and Interrogation Methods in Optical MEMS Accelerometers: A Review;IEEE Sensors Journal;2022-04-01

2. Design and analysis of moems based displacement sensor for detection of muscle activity in human body;International Journal of Information Technology;2020-10-11

3. Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings;Photonics;2020-07-18

4. Inertial sensors technologies for navigation applications: state of the art and future trends;Satellite Navigation;2020-01-20

5. Breaking through the intensity restriction of the asymmetric fiber Bragg grating based Fabry-Perot sensitivity enhancement system;7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Smart Structures and Materials for Manufacturing and Testing;2014-08-21

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