Sub-10 μHz/√Hz Measurement Instrumentation for 140-dB DR Frequency-Modulated MEMS Sensors
Author:
Affiliation:
1. Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy
2. ST Microelectronics, Cornaredo, Milano, Italy
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/19/10012124/09978715.pdf?arnumber=9978715
Reference24 articles.
1. Frequency-Modulated MEMS Gyroscopes: A Review
2. Frequency Modulated MEMS Lorentz Force Magnetometer Using CW/CCW Modes
3. Multi-Band MEMS Resonant Microphone Array for Continuous Lung-Sound Monitoring and Classification
4. Fully Integrated, 406 $\mu$A, $\text{5 }^{\circ}$/hr, Full Digital Output Lissajous Frequency-Modulated Gyroscope
5. Single-resonator, time-switched FM MEMS accelerometer with theoretical offset drift complete cancellation
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