Single-resonator, time-switched FM MEMS accelerometer with theoretical offset drift complete cancellation
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/8339522/8346457/08346497.pdf?arnumber=8346497
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Quadrature Compensation and Demodulation Phase Reference Selection for FM Accelerometers;2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2023-03-28
2. Sub-10 μHz/√Hz Measurement Instrumentation for 140-dB DR Frequency-Modulated MEMS Sensors;IEEE Transactions on Instrumentation and Measurement;2023
3. Towards Real-Time Frequency Modulated Accelerometer Bias Calibration;2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2022-05-08
4. Feasibility study of a resonant accelerometer with bistable electrostatically actuated cantilever as a sensing element;International Journal of Non-Linear Mechanics;2020-01
5. Fully Integrated, 406 $\mu$A, $\text{5 }^{\circ}$/hr, Full Digital Output Lissajous Frequency-Modulated Gyroscope;IEEE Transactions on Industrial Electronics;2019-09
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