Thickness Measurement Based on Eddy Current Sensor With Coaxial Double Coil for Chemical Mechanical Polishing
Author:
Affiliation:
1. Department of Mechanical Engineering, Tsinghua University, Beijing, China
Funder
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/19/9717300/09875353.pdf?arnumber=9875353
Reference24 articles.
1. Verification of Operation Principle on End Point Detection by Skin Effect in Chemical Mechanical Planarization
2. Application of an eddy-current method to measure electrical conductivity of thin films
3. A Thickness Measurement System for Metal Films Based on Eddy-Current Method With Phase Detection
4. Improvement of sensitivity of eddy current sensors for nano-scale thickness measurement of Cu films
5. In-situ measurement of Cu film thickness during the CMP process by using eddy current method alone
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