An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement-Reference-Cited by-同舟云学术

An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement

Published:2022 Issue: Volume:71 Page:1-10
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Li Cheng¹^ORCID,Yang Bo¹^ORCID,Zheng Xiang¹^ORCID,Sun Zhenyu¹^ORCID,Zhou Luqiang¹^ORCID,Huang Xin¹^ORCID,Guo Xin²^ORCID

Affiliation:

1. Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China

2. School of Automation, Nanjing University of Information Science and Technology, Nanjing, China

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Postgraduate Research and Practice Innovation Program of Jiangsu Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/19/9717300/09837094.pdf?arnumber=9837094

Reference39 articles.

1. In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor

2. A high-resolution microchip optomechanical accelerometer

3. MEMS based geophones and seismometers

4. High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

5. Fourier optics analysis of grating sensors with tilt errors

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