Three-Dimensional Digital Reconstruction Geometric Analysis for Fused Silica Microshell Resonators
Author:
Affiliation:
1. Key Laboratory of MEMS of Ministry of Education, School of Electronic Science and Engineering, Southeast University, Nanjing, China
Funder
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/19/9717300/09877921.pdf?arnumber=9877921
Reference21 articles.
1. High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG
2. Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and Gyroscopes
3. Hemipherical wineglass shells fabricated by a Chemical Foaming Process
4. Height Adjustment of 3-D Axisymmetric Microumbrella Shells for Tailoring Wineglass Frequency
5. Fabrication of hemispherical fused silica micro-resonator with tailored stiffness and mass distribution
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