1. Energy loss in MEMS resonators and the impact on inertial and RF devices;Weinberg,2009
2. The hemispherical resonator gyro: from wineglass to the planets;Rozelle,2009
3. 3-D micromachined hemispherical shell resonators with integrated capacitive transducers;Sorenson,2012
4. Isotropic etching of 111 SCS for wafer-scale manufacturing of perfectly hemispherical silicon molds;Fegely,2011
5. 3D-soule: a fabrication process for large scale integration and micromachining of spherical structures;Visvanathan,2011