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Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates

  • Published:1997 Issue:10 Volume:45 Page:1961-1968
  • ISSN:0018-9480
  • Container-title:IEEE Transactions on Microwave Theory and Techniques
  • language:
  • Short-container-title:IEEE Trans. Microwave Theory Techn.

Author:

Burghartz J.N.,Edelstein D.C.,Jenkiin K.A.,Kwark Y.H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Radiation

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